General terminology and process of vacuum coating technology

1.1 vacuumcoating: a method of preparing a film layer on a substrate under vacuum.

1.2 substrate: film layer receiver.

1.3 testingsubstrate: the substrate used for measurement and/or test at the beginning, during or after coating.

1.4 coatingmaterial: the raw material used to make the coating.

1.5 evaporationmaterial: coating material used for evaporation in vacuum evaporation.

1.6 sputteringmaterial: there are coating materials used for sputtering in vacuum sputtering.

1.7 filmmaterial (film material) film material: the material of the film layer.

1.8 evaporationrate: the amount of material evaporated in a given time interval, divided by the time interval.

1.9 sputteringrate: the amount of material sputtered in a given time interval, divided by the time interval.

1.10 depositionrate: the amount of material deposited on the substrate in a given time interval, divided by the time interval and the surface area of the substrate.

1.11 coatingangle: the angle between the direction of particles incident on the substrate and the normal of the surface to be coated.

2 process

2.1 vacuumevaporationcoating: the vacuum coating process that evaporates the coating material.

2.1.1 simultaneousevaporation: vacuum evaporation in which several evaporators are used to evaporate various evaporation materials on the substrate at the same time.

2.1.2 evaporationfieldevaporation: the vacuum evaporation from the materials evaporated at the same time in the evaporation field to the substrate (this process is applied to large-area evaporation to obtain ideal film thickness distribution).

2.1.3 reactivevacuumevaporation: the vacuum evaporation of the film material with ideal chemical composition by reacting with gas.

2.1.4 Reactive vacuum evaporation in evaporator: vacuum evaporation of film materials with ideal chemical composition by reacting with various evaporation materials in evaporator.

2.1.5 directheatingevaporation: The heat necessary for evaporation of evaporation material is the evaporation of the evaporation material (in or without crucible) itself.

2.1.6 inducedheatingevaporation: evaporation of evaporation materials by induction eddy current heating.

2.1.7 electronbeamevaporation: evaporation of evaporating materials heated by electron bombardment.